Manufacturing technology producer MKS Instruments invested $9.3m in US-based semiconductor and microelectronics technology provider Reno Sub Systems on Monday as part of a $14m series B round.
The MKS-led round also included Intel Capital, which acts as semiconductor technology manufacturer Intel’s corporate venturing arm, and an undisclosed original equipment manufacturing technology supplier.
Reno develops radio frequency matching networks and power generators, as well as gas delivery systems, to be used in nanoscale manufacturing. It will use the series B capital to accelerate the journey of its products to market.
Gerald Colella, CEO of MKS Instruments, said: “We were impressed by the technology being developed by Reno and were drawn to the opportunity to invest in a proven team of engineers and technologists, alongside two industry leaders in semiconductor process technology, to advance technology that could be an enabler in our core markets.”
Intel Capital had previously joined Innovacorp and undisclosed additional investors for Reno’s November 2014 series A round, reported by local newspaper The Chronicle Herald to be sized at $7.5m.